SPMwikiTemperature calibration of manipulator 2018-04-07
The main functions of 4-axis manipulator on the prepartion chamber:
- Z-driving distance: up to 500mm
- X/y-driving range: ±25mm
- Rotation：360°
- Five sample parking ports
- Temperature range (7-1400K)
- E-beam heating up to 1400K（with LN2 cooling）
- Down to 7K by Helium
- Direct heating for semiconductors （<5A)
It is a pitty that we are not able to know the temperature of the sample when heating or cooling the sample. But we have made several calibrations which could be the refference table for general operations.
The schematic diagram of the manipulator head. There are 5 pins which are insulated with each other. The labled pin number is corresponding to the cables at the end of the manipulator. Pin-1 and Pin-3 are coated by NiCr and Ni which is materials of Type-k thermocouple.
There are lots of wires, ceramics solder joint around the manipulator, for protecting these parts, you need to cool the whole manipulator by LN2 when heating the sample.
A standard copper sample mounted with Type-k thermocouple (sensor at the bottom) and Pt1000 resistance (sensor on the surface). We can put this sample to the heating stage (labled ① in figure1). When heating or cooling this sample, we would record the temperature reading both from the thermocouple and resistance at a certain heating power or cooling time.
Here is the heating calibration table which was made on 2015.07.20. The temperature of manipulator head was controlled at 300K. And the heating power was kept for 15mins and then recorded the temperature.
Here is the low temperature calibration table which was made on 2015.07.13. (By LN2)
